Mems Transducer For Hearing Aid Device
نویسندگان
چکیده
An implantable MEMS piezoelectric transducer for middle ear hearing aids was developed. The physical vibration properties are simulated using finite element method. A study of thermoelastic damping effect of four designed MEMS mirrors is presented. An optical measurement system based on Mach-Zehnder interferometer is developed, and the accuracy of this system is tested.
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